| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the shape of a spherical surface or an aspherical surface without problems of vignetting. SOLUTION: Assume a spherical surface is located at a position, where a surface to be inspected is arranged, a surface 1 to be inspected being arranged at the position where the surface to be inspected is arranged is scanned by applying coherent light 40, passing through a curvature center O of the assumed spherical surface on each of a plurality of meridional sections, on the assumed spherical surface passing through the position where the surface to be inspected is arranged, and the deviation between the surface to be inspected and the assumed spherical surface is subjected to light interference length measurement by the reflected light from the surface to be inspected. |
