发明名称 Method and measuring device for the detection of an object
摘要 The object (1) is illuminated by a light source. A lens system (3) focuses on at least part of the object to enable a CCD camera (4) to record an image. The process is repeated for a number of times varying the exposure times or light intensity controlled by the camera control unit (5). The image data provided by the camera is evaluated by a computer (7) to derive an average value closest to the expected value. An Independent claim is also included for a measurement system.
申请公布号 EP1273877(A2) 申请公布日期 2003.01.08
申请号 EP20020100722 申请日期 2002.06.19
申请人 LEICA MICROSYSTEMS SEMICONDUCTOR GMBH 发明人 RINN, KLAUS, DR.
分类号 G01B11/02;G01B11/03;G03F1/00;G06K9/00;G06K9/20 主分类号 G01B11/02
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