发明名称 |
Method and measuring device for the detection of an object |
摘要 |
The object (1) is illuminated by a light source. A lens system (3) focuses on at least part of the object to enable a CCD camera (4) to record an image. The process is repeated for a number of times varying the exposure times or light intensity controlled by the camera control unit (5). The image data provided by the camera is evaluated by a computer (7) to derive an average value closest to the expected value. An Independent claim is also included for a measurement system. |
申请公布号 |
EP1273877(A2) |
申请公布日期 |
2003.01.08 |
申请号 |
EP20020100722 |
申请日期 |
2002.06.19 |
申请人 |
LEICA MICROSYSTEMS SEMICONDUCTOR GMBH |
发明人 |
RINN, KLAUS, DR. |
分类号 |
G01B11/02;G01B11/03;G03F1/00;G06K9/00;G06K9/20 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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