发明名称 |
IMAGE SENSOR |
摘要 |
PURPOSE: An image sensor is provided to improve optical characteristics by minimizing light reflectance from a silicon substrate. CONSTITUTION: A photodiode(PD) is formed in a substrate(40) of a cell region. A silicide layer(42) is formed on the substrate(40) of a peripheral region. An insulating layer(43) is formed on the entire surface of the resultant structure. An anti-reflective layer(41) for matching an index of reflection and for preventing a formation of silicide is formed between the substrate(40) and the insulating layer(43) of the cell region. The anti-reflective layer(41) is composed of silicon nitride and has an index of reflection from 1.7 to 2.7.
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申请公布号 |
KR20030002017(A) |
申请公布日期 |
2003.01.08 |
申请号 |
KR20010038747 |
申请日期 |
2001.06.30 |
申请人 |
HYNIX SEMICONDUCTOR INC. |
发明人 |
LEE, GYEONG RAK;LIM, YEON SEOP |
分类号 |
H01L27/146;(IPC1-7):H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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地址 |
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