发明名称 IMAGE SENSOR
摘要 PURPOSE: An image sensor is provided to improve optical characteristics by minimizing light reflectance from a silicon substrate. CONSTITUTION: A photodiode(PD) is formed in a substrate(40) of a cell region. A silicide layer(42) is formed on the substrate(40) of a peripheral region. An insulating layer(43) is formed on the entire surface of the resultant structure. An anti-reflective layer(41) for matching an index of reflection and for preventing a formation of silicide is formed between the substrate(40) and the insulating layer(43) of the cell region. The anti-reflective layer(41) is composed of silicon nitride and has an index of reflection from 1.7 to 2.7.
申请公布号 KR20030002017(A) 申请公布日期 2003.01.08
申请号 KR20010038747 申请日期 2001.06.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, GYEONG RAK;LIM, YEON SEOP
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项
地址