| 摘要 |
PURPOSE: A vacuum pumping apparatus of a vacuum injection system is provided to form the states of high vacuum of plural load lock chambers by using a turbo pump instead of a cryopump. CONSTITUTION: An ion injection system includes a turbo pump(50) instead of an existing cryopump. A low vacuum pump(52) is used for forming a state of low vacuum of the inside of the turbo pump(50). A turbo pump control portion(54) controls an operation of the turbo pump(50). An interface portion(56) performs a signal transmission operation between a compressor(20) and the turbo pump control portion(54) and between the turbo pump control portion(54) and a cryopump control portion(18). The interface portion(56) converts a control voltage of the compressor(20) to a digital signal, applies a start signal to the turbo pump control portion(54), converts a normal operation sense signal of the turbo pump control portion(54) to an analog signal, and a predetermined signal(a') to the cryopump control portion(18). Accordingly, the states of high vacuum are formed in plural load lock chambers(16-1,16-2,16-3) by the turbo pump(50).
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