GAS CONTAINER FOR SEMICONDUCTOR FABRICATION

摘要

PURPOSE: A gas container for semiconductor fabrication is provided to prevent an accident or environmental pollution due to the leakage of the noxious gas by forcibly cutting of the leakage of the gas. CONSTITUTION: A gas container(300) comprises a container body(310), a container neck(330), a gas jet nozzle(350), an end cap(390), and a main valve(370). A gas cut-off unit for forcibly closing the container neck is formed in the container neck. The gas cut-off unit consists of a gas sensing unit and a valve for forcibly cutting off the container neck by a signal transmitted from the gas sensing unit. Herein, the gas cut-off unit is a normal open type solenoid valve(340). The gas sensing unit consists of a leakage sensing controller, a gas leakage sensor, a charge cell, and an operating switch(356).