发明名称 METHOD FOR MANUFACTURING SILICON
摘要 PROBLEM TO BE SOLVED: To provide an industrial method for manufacturing silicon smoothly by preventing the blocking of a nozzle part of a reaction apparatus with silicon which is formed by reaction of chlorosilanes with hydrogen. SOLUTION: In the method for reacting chlorosilanes with hydrogen for formation of silicon, a reaction reagent capable of reacting with the formed silicon is successively or intermittently introduced into the reaction system.
申请公布号 JP2003002627(A) 申请公布日期 2003.01.08
申请号 JP20010187650 申请日期 2001.06.21
申请人 TOKUYAMA CORP 发明人 NAKAJIMA JUNICHIRO;WAKAMATSU SATOSHI
分类号 C01B33/03;(IPC1-7):C01B33/03 主分类号 C01B33/03
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