| 摘要 |
PURPOSE: An apparatus for correcting a location of a wafer in a pod opener is provided to prevent a damage of the wafer by detecting and correcting a wrong location of a wafer. CONSTITUTION: A wafer location correction portion is driven by a motor(420). A driving shaft(430) receives rotary power from the motor(420). A screw is formed on an outer circumference of the driving shaft(430). A mobile member(440) having a spiral groove is inserted into the screw of the driving shaft(430). A sensing bar(460) is fixed to one side of the mobile member(440). The mobile member(440) is moved by the motor(420) and the sensing bar(460) is moved thereby. The first and the second sensor(500,510) are used for sensing motions of the sensing bar(460) to control a moving distance. A pin(450) is located on the mobile member(440). One side of a pushing lever(410) is inserted into the pin(450). The pushing lever(410) includes the first and the second member(411,413) and a rotary shaft(412) formed therebetween. A long hole(414) is formed on the first member(411) in order to guide the pin(450).
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