| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection apparatus by which whether a foreign substance in about submicrons exists on the surface or the rear of a specimen can be detected so as to separate the surface from the rear. SOLUTION: The surface of the specimen 10 is irradiated with two kinds of light beams Is1, Is2 from oblique directions at respectively different anglesθi1,θ2; beams of scattered light D1, D2 from the specimen 10 are detected by light receiving elements 31, 32 via condensing lenses 21, 22; detected signals re processed by signal processing circuits 41, 42; the processed signals are processed by a processing circuit 51; and to which of the surface 10a and the rear 10b of the specimen 10 the foreign substance has adhered is judged.
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