发明名称 METHOD AND APPARATUS FOR MEASURING OPTICAL PROPERTY OF REJECTION FILTER
摘要 PROBLEM TO BE SOLVED: To provide a method for measuring optical property of rejection filter, by which the profile measurement of a rejection filter having a high value of OD in a narrow band can be easily carried out. SOLUTION: The method for measuring optical property of rejection filter with a structure of hologram includes a light measuring step (s10), in which a monochromatic light with a wavelength identical to a wavelength considered as the rejection wavelength of the filter to be evaluated in the optical property is projected to the filter, and the intensity of the light passing therethrough is measured while rotating the filter in such a direction that the rejection wavelength shifts, and a profile creating step (s12), in which the relation between the wavelength and the transmittance of the filter is obtained on the basis of the relation between an angle of the filter and the intensity of passing light measured in the light measuring step (s10).
申请公布号 JP2003004589(A) 申请公布日期 2003.01.08
申请号 JP20010193173 申请日期 2001.06.26
申请人 JASCO CORP 发明人 KAMENO ITSUHITO;YOSHIKI YASUNOBU;KAWASAKI KAZUHIRO
分类号 G01J3/42;G01M11/00;G02B5/32;(IPC1-7):G01M11/00 主分类号 G01J3/42
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