| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electronic spectroscope capable of aligning the axis of an image forming lens with the optical axis of a decelerating lens and a method for adjusting the position of the lens axis. SOLUTION: A sample 5 is retraced from the optical axis O. Then the image forming lens 9 is controlled in such a way that the image of photo-electrons emitted from index substance 13 is formed in a field restricting aperture 20. The diameter of the opening of the field restricting aperture 20 is set in a size suitable for the outer diameter of the index matter. The upper surface of the image forming lens 9 is irradiated with X-rays from an X-ray source 4. The photo-electrons emitted from the index substance 13 by the X-ray irradiation are detected by a detector 19, and a control device 23 obtains a signal intensity value I1 of the photo-electrons emitted from the index substance on the basis of the output of the detector 19. As watching the signal intensity value I1 displayed on a display screen, an operator adjusts a mechanism 15 for adjusting the position of the image forming lens 9 in such a way that the signal intensity value I1 takes a maximum value to adjust the x- and y-positions of the image forming lens 9.</p> |
