| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an apparatus for recovery sulfur hexafluoride gas containing a small amount of residual noncondensed gas from a mixed gas of sulfur hexafluoride and noncondensed gas. SOLUTION: The sulfur hexafluoride gas recovery apparatus has a gas separating device 130 for separating and removing noncondensed gas in the mixed gas with a gas separating film 131 and obtaining sulfur hexafluoride gas, a gas absorbent 210 for absorbing and removing a small amount of residual noncondensed gas in the obtained sulfur hexafluoride gas, for example a gas absorbing device 200 having synthetic zeolite containing alminosilicate as a main component, preferably a vibrating device 240 for desorbing sulfur hexafluoride which is adhered to the gas absorbent 210.</p> |
