| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual inspection apparatus in which the description and the processing item of a processing procedure for a visual inspection treatment are changed simply. SOLUTION: The visual inspection apparatus comprises an imaging means 16 with reference to a semiconductor chip 12 for visual inspection, a movement means 14 for the imaging means, a control unit 48 for the movement means, an image-signal processing part 44 regarding the external appearance of the chip obtained by the imaging means, and a spreadsheet processing means by which a chip visual inspection item and a processed result by the image processing part 44 with reference to the item are described automatically in a prescribed column. The spreadsheet processing means uses spreadsheet software so that processing information used to control image processing software is incorporated into a part of the spreadsheet software. When the spreadsheet software is started, the image processing software can be started, and a processed result obtained by the image processing software can be used again as a calculated and processed result by the spreadsheet software. Since inspection information is described in the spreadsheet software as spreadsheet processing information, an image processing content can be changed only by changing a description content. The change operation such as the addition, the deletion or the like of an inspection item is very simple, and an advance special knowledge is not required. |
