| 摘要 |
PROBLEM TO BE SOLVED: To provide a gate valve for a semiconductor single crystal pulling apparatus, with which the airtightness of a vacuum chamber is hardly lowered by vertical movement and turning and which has a constitution that a closed part is hardly affected by the radiation heat from the vacuum chamber. SOLUTION: The gate valve for the semiconductor single crystal pulling apparatus has a constitution that a valve body 22 is provided so as to be freely turned and freely moved in the vertical direction in a valve box 21 attached between the vacuum chamber 4a, 4b and a furnace chamber 5 through a connecting member 23 attached to a turning shaft 24, and a seal ring 56 is attached to an annular seal bearing surface provided at the lower face part of the outer periphery of the valve body 22 or to an annular seal bearing surface provided at a part of the upper end face 55 opposed to the seal bearing surface of the valve body mentioned above of the vacuum chamber 4a, 4b, and thereby the upper end opening part 4c of the vacuum chamber 4a, 4b is made to be freely opened and closed by the valve body 22, the upper face at the approximately central part of the valve body 22 is attached to the tip end part of the connecting member 23 through a swing holding member 50 capable of swingably pressing.
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