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发明名称
CERAMIC HEATER
摘要
申请公布号
EP1274280(A1)
申请公布日期
2003.01.08
申请号
EP20010919946
申请日期
2001.04.16
申请人
IBIDEN CO., LTD.
发明人
HIRAMATSU, YASUJI;ITO, YASUTAKA
分类号
H01L21/00;H05B3/14;H05B3/26;(IPC1-7):H05B3/20;H05B3/10;H01L21/68;H01L21/027;H05B3/16
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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