DEFECT INSPECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a defect inspection apparatus which can highly accurately detect defects of an inspection object having a colored pattern. SOLUTION: The inspection object 100 having the colored pattern is illuminated with a light having a wavelength of not smaller than 780 nm by a light source 1. Only a light reflected at an inspection object face of the inspection object 100 and having a wavelength of not smaller than 780 nm is received by a camera 2, whereby an image of the inspection object 100 is formed. Defects of the inspection object 100 are detected by a CPU 7 or the like with the use of light and dark image data formed from the formed image.