| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray inspection apparatus in which a current flowing to a steering coil for X-ray deflection in an X-ray tube is adjusted easily and which can make the output of an X-ray detection device maximum. SOLUTION: Electrons are emitted from a cathode filament 1 to which a negative high voltage is applied, they are converged by a Wehnelt electrode 2, and they are accelerated to a high speed by an anode 3 so as to enter a hole in the center of the anode 3. Their electron beam is deflected by the steering coil 4, and it is converged by a focus coil 5 so as to collide with a target 6. Generated transmission-direction X-rays are incident on the X-ray image detection device 7 so as to enter a PC 8 as a luminance-output image signal. An X-Y deflection instruction signal is output by optical-axis auxiliary software 9, a current value flowing to the steering coil 4 via an X-ray controller 10 is changed, and an X-Y deflection value which makes the image signal maximum is set automatically.</p> |
