| 摘要 |
PROBLEM TO BE SOLVED: To reduce a facility cost as compared with the number of installed vacuum pumps. SOLUTION: An exhaust system 30 comprises a plurality of branch channels 32 (32a, 32b, etc.), connected to a main exhaust channel 12. An exhaust gas 46 exhausted from the vacuum pump 20 flows to a buffer tank 36 via an input passage 40 for constituting a branch channel 32a. The gas 46 in the tank 36 is guided to a main exhaust channel 12 via an output passage 44 for constituting the channel 32a. The passage 44 becomes a flow-out limit part having a smaller channel sectional area than the passage 40 to increase a flowing resistance of the gas 46 flowing out from the tank 36 to thereby gradually input the gas 46 in the tank 36 to the channel 12.
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