发明名称 |
METHOD FOR DEPOSITION OF ALUMINUM OXIDE THIN FILM, AND METHOD FOR DEPOSITION OF ALUMINUM NITRIDE THIN FILM |
摘要 |
PROBLEM TO BE SOLVED: To provide a film deposition method of improved isolation voltage for depositing an aluminum oxide thin film or an aluminum nitride thin film by reactive sputtering. SOLUTION: A pulse power source is used, and sputter-gas pressure is made to 0.08-0.15 Pa. A greater effect can be obtained if positive pulse period is made to 0.5-1μs. It is desirable to regulate sputter-gas pressure to >=0.25 Pa at the initiation of film deposition and 0.08-0.15 Pa after the initiation of film deposition, respectively. Film stress can be reduced by the regulation of the sputter-gas pressure to 0.08-0.15 Pa, and resultantly leakage current can be reduced and isolation voltage can be improved. Ions made incident upon a substrate can be reduced and the occurrence of abnormal discharge can be prevented by the regulation of the positive pulse period of 0.5-1μs. By the regulation of the pressure to >=0.25 Pa at the initiation of film deposition, the occurrence of roughness at the interface between the substrate and the resultant film can be prevented.
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申请公布号 |
JP2003003259(A) |
申请公布日期 |
2003.01.08 |
申请号 |
JP20010187463 |
申请日期 |
2001.06.21 |
申请人 |
HITACHI LTD |
发明人 |
KIYONO TOMOYUKI;YANAGIDA NORIFUMI;UMEHARA SATOSHI |
分类号 |
C23C14/34;C23C14/06;C23C14/08;H01L21/316;H01L21/318;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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