摘要 |
A secondary capacitor (18,20) comprises an outer surface (28,28') made of a material that is insert to the laser gas, and aligned in the direction of a high voltage electrode (12). The outer surface forms at least one delimiting surface of a flow channel (26,26') for the laser gas. Several secondary capacitors may be arranged adjacent to each other to form a capacitor bank. The axis of the capacitor bank is parallel to the axis of the high voltage electrode. |