SYSTEM FOR THE PREFERENTIAL REMOVAL OF SILICON OXIDE,申请号EP20010926798-传众专利搜索

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发明名称	SYSTEM FOR THE PREFERENTIAL REMOVAL OF SILICON OXIDE
摘要
申请公布号	EP1272580(A2)	申请公布日期	2003.01.08
申请号	EP20010926798	申请日期	2001.04.09
申请人	CABOT MICROELECTRONICS CORPORATION	发明人	MUELLER, BRIAN, L.;CHAMBERLAIN, JEFFREY, P.;SCHROEDER, DAVID, J.
分类号	B24B37/00;C09G1/02;C09K3/14;H01L21/304;H01L21/306;H01L21/3105;(IPC1-7):C09G1/02	主分类号	B24B37/00
代理机构		代理人
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