Early entry,申请号GB20020028420-传众专利搜索

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发明名称	Early entry
摘要
申请公布号	GB0228420(D0)	申请公布日期	2003.01.08
申请号	GB20020028420	申请日期	2002.04.29
申请人	INFINEON TECHNOLOGIES AG	发明人
分类号	G03F7/20;H01L21/66	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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