| 摘要 |
PROBLEM TO BE SOLVED: To provide an accurate alignment method, that does not depend on the density and shape of patterns in a comparison inspection for detecting defects from a difference, by comparing an image to be inspected with a reference image, to provide a high-sensitivity comparison inspection method and a high-sensitivity comparison inspection apparatus for reducing error detection due to alignment errors, and further to provide a high-sensitivity comparison inspection method and a high-sensitivity comparison apparatus over a wider range for minimizing decrease in detection sensitivity as required by decreasing inspection sensitivity, only when alignment fails. SOLUTION: An image to be inspected and a reference image are divided into each plurality of regions, the amount of position deviation is calculated between the split images, and the amount of position deviation of the entire image is determined, using only highly reliable amount of position deviation out of the plurality of amount of position deviation, thus enabling accurate alignment, regardless of the density and shape of patterns, the magnitude of brightness difference between images, and the magnitude of brightness irregularities within images. Additionally, by monitoring alignment accuracy, detection sensitivity is adjusted, as needed. |
