METHOD OF MANUFACTURING LAMINATED INTERLAYER OPTICAL DIRECTIONAL COUPLER

摘要

PROBLEM TO BE SOLVED: To manufacture a laminated interlayer optical directional coupler which makes high-density integration possible. SOLUTION: In forming a lower core 13a by etching a lower core layer 13, a broad lower straight-line margin section 13d is formed (process step 2) and in forming an upper core 15 by etching an upper core layer 15, a broad upper straight-line margin section 15d is formed (process step 5). The broad lower straight-line margin section 13d and the broad upper straight-line margin section 15d are simultaneously etched by using the same photomask, by which a lower optical coupling straight-like section 13g and upper optical coupling straight-like section 15g of the same width are formed in above and below (process step 6). Further, these sections are covered by an overclad 17 (process step 17).