发明名称 METHOD FOR CUTTING OFF SUBSTRATE FROM WORK
摘要 PROBLEM TO BE SOLVED: To effectively avoid flaws to be linked to heating of a work. SOLUTION: A method for cutting off a work is provided wherein in a method for cutting off a rod-like or block-like work by using a saw, a temperature of the work is measured during cutting-off, its measuring signal is transmitted to an adjusting unit, the adjusting unit prepares an adjusting signal, and the adjusting signal is used for adjusting the temperature of the work or the temperature of the work is adjusted by the adjusting signal based on a preliminarily determined adjusting curve.
申请公布号 JP2003001624(A) 申请公布日期 2003.01.08
申请号 JP20020133875 申请日期 2002.05.09
申请人 WACKER SILTRONIC AG 发明人 LUNDT HOLGER DR;HUBER LOTHAR;WIESNER PETER
分类号 B24B27/06;B28D5/00;B28D5/04;B28D7/02;H01L21/301;H01L21/304;(IPC1-7):B28D5/04 主分类号 B24B27/06
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