| 摘要 |
PROBLEM TO BE SOLVED: To provide a high speed scanning probe microscope in which a probe and a sample can be aligned easily with high accuracy. SOLUTION: The scanning probe microscope comprises an observation optical system 3 which can observe a sample 4, a scanning system 17 disposed at a specified distance from the observation optical system 3, a mechanism 5 for moving the sample 4 with respect to the observation optical system 3 and the scanning system 17, a detection optical system 27 which can optically detect the positional relation between the probe 26 of the scanning system 17 and an observation point, a unit 23 for operating the shift between the probe 26 and the observation point A based on data detected by the detection optical system 27, and a stage controller 22 for controlling the moving mechanism 5 to eliminate the shift operated by the operating unit 23. The detection optical system 27 is disposed oppositely to the scanning system 17 and can optically detect the positional relation between the probe 26 of the scanning system 17 and the observation point.
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