| 摘要 |
PROBLEM TO BE SOLVED: To elongate the service lives of seal members as consumables, to reduce the frequency of maintenance, and to reduce cost. SOLUTION: On cleaning treatment, inert gas having a prescribed pressure higher than that in a film deposition chamber 3 is forcedly fed to an annular groove 32 in the region of a ceiling board 4 and an annular groove 55 in the region of a carrying-in and out port 51, and the side of the film deposition chamber 3 and the sides of O-rings 31 and 53 are cut off, and the arrival of fluorine ions therein is checked to prevent their exposure to fluorine ions and to suppress deterioration in the O-rings 31 and 53. In this way, the service lives of the expensive O-rings 31 and 53 as consumables are remarkably elongated, the frequency of maintenance is reduced, and cost is remarkably reduced.
|
