DUST REMOVER

摘要

PROBLEM TO BE SOLVED: To surely remove dust without increasing the flow passage resistance of piping. SOLUTION: The dust remover 10 used when pellets are transferred from a wafer stage to an intermediate stage or from the intermediate stage to a lead frame is provided with a dust capturing section 15 coated with tacky adhesive materials, such as grease, in a bend section 13A of the piping 13. The dust is plunged into a dust capturing section 15 by the inertia of the dust and is thus captured.