发明名称 Developer solution and edge bead remover composition
摘要 A developer solution and edge bead remover. composition includes:(A) water;(B) at least a basic compound; and(C) a non-ionic surfactant having the structure (I): wherein:R1, R2, R3, R4 and R5 are selected from the group consisting of hydrogen, alkyl, aryl, aralkyl and halogen, and at least two of R1, R2, R3, R4 and RS are selected from the group consisting of aralkyl and aryl, R6 is selected from the group consisting of ethylene, propylene, and butylene, R7 is selected from the group consisting of hydrogen, acetyl, alkyl, and aryl, and n is an integer ranging from 6 to 23.
申请公布号 US6503694(B1) 申请公布日期 2003.01.07
申请号 US20010878248 申请日期 2001.06.12
申请人 CHI MEI CORPORATION;CHI MEI OPTOELECTRONICS CORPORATION 发明人 LI CHUN-HSIEN;SHENG PEI-HUA;LIN BO-HSUAN;LEE YUAN-PIN;CHANG CHIH-NENG
分类号 G03F7/32;(IPC1-7):G03F7/32;G03F7/42 主分类号 G03F7/32
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