,申请号JP20000620411-传众专利搜索

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发明名称
摘要
申请公布号	JP2003500694(A)	申请公布日期	2003.01.07
申请号	JP20000620411	申请日期	2000.05.19
申请人		发明人
分类号	G02B5/08;G02B27/09;G02B27/14;G03F7/20;H01L21/027;(IPC1-7):G02B27/09	主分类号	G02B5/08
代理机构		代理人
主权项
地址

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