APPARATUS FOR CLEANING DIAMOND CONDITIONER

摘要

PURPOSE: An apparatus for cleaning a diamond conditioner is provided to remove alien substances from a bottom of a conditioner by installing a plurality of gas injection nozzles on a bottom portion of a tray of a cleaner. CONSTITUTION: A ultra-pure water injection nozzle is adhered at an upper portion of a main body(100) of a cleaner. A ultra-pure water supply portion(30) supplies ultra-pure water to the ultra-pure water injection nozzle. A conditioner(20) is used for grinding a surface of a pad. A lower portion of the conditioner(20) is adhered at a lower portion of the conditioner(20) in order to perform a conditioning operation. A tray is adhered at the center of an upper portion of the main body(100). A plurality of gas injection nozzles are arranged on a bottom of the tray. A gas supply portion(40) supplies a gas of high temperature and high pressure to the gas injection nozzles. The first and the second valve(32,42) are used for discharging or stopping the ultra-pure water or the gas. The first and the second driving portion(35,45) supply air the first and the second valve(32,42).