| 摘要 |
PURPOSE: An image sensor is provided to reduce a focusing distance and to effectively improve a focusing efficiency by forming a microlens made of a nitride layer and an oxynitride layer on a passivation layer. CONSTITUTION: A passivation layer(9) is formed on a substrate(1) having a lower layer(4). At this time, the passivation layer(9) having a trapezoid structure is sequentially stacked on a nitride layer and an oxynitride layer. A spacer(10) is formed at both sidewalls of the passivation layer(9). A microlens is composed of the passivation layer(9) and the spacer(10). A photoresist layer(11) is formed on the entire surface of the resultant structure for planarizing. A color filter(12) is formed on the photoresist layer(11) overlapped with the microlens.
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