| 摘要 |
PURPOSE: To restrain vibration generated in a vacuum pump from being propagated to external equipment such as an electron microscope. CONSTITUTION: A casing (a casing separation part 3, a casing main body 4) storing a stator 26, stator blades 27, a rotor 30, and rotor blades 33 as an exhaust function part is connected to a suction port part 1 provided with a suction port 1c for sucking gas from an outside, with a space, via an elastic member 11. A suction space between the both is sealed with a cylindrical bellows body 10 of a sealing means, and moving regulation members 15, 16, 17 for regulating a separation amount changing in accompaniment to relative moving between the both, and moving regulation members 21, 22 are provided between the suction port part 1 and the casing (the separation part 3 and the main body 4). The elastic member holds a proper elastic force by the regulation members to provide an excellent vibration reducing property all the time, and the vibration is prevented from being propagated to the external equipment or the like to worsen its function and durability. The elastic member and a seal member are prevented from being plastically deformed and damaged, and the vacuum pump is prevented from acting violently by an abrupt accident. |
