| 摘要 |
PURPOSE: A ceramic chuck is provided to prevent a vacuum break caused due to a scratch by mounting a rubber pad on the ceramic chuck. CONSTITUTION: A wafer is settled in a chuck(100). A table fixes the chuck. The first rubber pad(112) exposes the first fixing hole(114) formed in the periphery of the center of the surface to which the chuck is fixed to fix the wafer, formed of circular type having a predetermined width. The second rubber pad(104) exposes a fixing groove(102) for fixing the chuck to the table, formed of a circular type having a predetermined width.
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