| 摘要 |
A method is described for transferring a disc-shaped workpiece 1 from a workpiece carrier 2, on which the workpiece 1 is fastened along its first main surface 13 by means of a first double-sided adhesive foil 3, onto a carrier foil, wherein the first double-sided adhesive foil 3 is connected by a first adhesive layer 15 to the workpiece carrier 2 and by a second adhesive layer 17 to the workpiece 1, with the following process steps: ast weakening the second adhesive layer 17 through decomposition of its adhesive material down to a reduced adhesive force which is substantially smaller than the adhesive force of the first adhesive layer 15, ast fastening the workpiece carrier 2 to a first retaining device 5, ast fastening the workpiece 1 with its second main surface 14 to a second retaining 6 device by means of a second double-sided adhesive foil 7, such that the second double-sided adhesive foil 7 is connected by a third adhesive layer 9 to the second retaining device and by a fourth adhesive layer 11 to the workpiece 1, and the adhesive forces of the third 9 and the fourth adhesive layer 11 are substantially greater than the adhesive force of the weakened second adhesive layer 17, ast separating the workpiece 1 from the first double-sided adhesive foil 3 along the weakened second adhesive layer 17 through the application of a pulling force between the first 5 and the second retaining device 6, ast positioning the workpiece 1 with the second retaining device 6 above the carrier foil, ast weakening the fourth adhesive layer 11 through decomposition of the adhesive substance down to an adhesive force which is substantially smaller than the adhesive force of the third adhesive layer 9, ast placing the workpiece on the carrier foil, and ast separating the workpiece 1 from the second double-sided adhesive 7 foil along the weakened fourth adhesive layer 11 by means of a gas pressure applied between the second double-sided adhesive foil 7 and the workpiece 1. A device for carrying out this method is also described. A simple and inexpensive removal of a workpiece of the kind mentioned from a workpiece carrier is rendered possible thereby. |
