ACOUSTICAL ARRAY WITH MULTILAYER SUBSTRATE INTEGRATED CIRCUITS

摘要

A high density, exceptionally complex and compact ultrasound transducer array 30 using multi-layer structures composed of active integrated circuit devices on various substrates 400, 402, 404, 406 and passive devices. Electrically conducting interconnections between substrates are implemented with micro-vias 408 configured with conductors extending through the substrates, permitting the use of divided or different integrated circuit technologies arranged and/or isolated within different integrated circuit substrates or layers of the ultrasound transducer assembly. The various layers may be assembled with solders of respectively lower reflow temperatures, to permit testing of selected layers and circuits prior to completion.