发明名称 METHOD AND DEVICE FOR SYNTHESIZING HIGH ORIENTATIONALLY ARRANGED CARBON NANO-TUBE BY USING ORGANIC LIQUID
摘要 <p>A method and a device for synthesizing a high orientationally arranged carbon nano-tube by using organic liquid, the method comprising the steps of depositing a film formed of metal elements on a substrate, exposing the substrate (3) having the film deposited thereon to hydrogen plasma, and heating the substrate (3) exposed to the hydrogen plasma to a specified temperature in the organic liquid (10), the device comprising a water cooling means (2) for cooling a liquid container (1) installed on the outside of the liquid container (1), a substrate holder (5) having electrodes (4) for holding the substrate (3) and flowing a current to the substrate (3), a condensing means (7) comprising water cooling pipes (6) for returning organic liquid vapor evaporated from the liquid container (1) after cooling and condensing, and a cover (9) for holding the substrate holder (5), the condensing means (7), and a valve (8) for leading N2 gas, wherein the organic liquid (10) is sealingly held by the liquid container (1) and the cover (9), whereby a large amount of carbon nano-tube can be synthesized safely at a low cost.</p>
申请公布号 WO2003000590(P1) 申请公布日期 2003.01.03
申请号 JP2002006235 申请日期 2002.06.21
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