| 摘要 |
<p>A manufacturing device and a manufacturing method capable of forming a DLC film on the outer wall surface or inner wall surface of a container by the combination of a high-frequency capacitive coupling type discharge system with a microwave discharge system, and a DLC film-coated container; the manufacturing device (100) capable of forming the DLC film on the outer wall surface or inner wall surface of a plastic container (1), characterized by comprising a grounded vacuum chamber (2) for storing the plastic container (1), a high-frequency bias electrode (4) installed near the inner wall of the plastic container (1), a microwave supply means (10) for generating material gas base plasma, and a high-frequency output supply means (13) connected to the high-frequency bias electrode (4).</p> |
