发明名称 |
SCANNING ELECTRON MICROSCOPE |
摘要 |
<p>A scanning electron microscope with an energy filter which can positively utilize secondary electrons and/or reflected electrons which collide against a mesh electrode and are lost. The scanning electron microscope which has a porous electrode for producing an electric field for energy-filtering electrons produced by applying a primary electron beam to a sample and a 1st electron detector which detects electrons passing through the porous electrode is characterized by further having a porous structure provided near the sample, a deflector which deflects electrons from the axis of the primary electron beam, and a 2nd electron detector which detects the electrons deflected by the deflector. <IMAGE></p> |
申请公布号 |
EP1271603(A1) |
申请公布日期 |
2003.01.02 |
申请号 |
EP20000913013 |
申请日期 |
2000.03.31 |
申请人 |
HITACHI, LTD. |
发明人 |
TODOKORO, HIDEO;EZUMI, MAKOTO;OSE, YOICHI;SUZUKI, NAOMASA |
分类号 |
H01J37/244;G01Q30/02;H01J37/28;(IPC1-7):H01J37/22 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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