| 摘要 |
<p>It is an object of the present invention to provide an exhaust pipe used for discharging a gas from a reaction vacuum chamber, which effectively prevents a substance contained in the discharged gas from being deposited and accumulated on an inner surface of the exhaust pipe. An exhaust pipe 10 is characterized in that it comprises an inner cylinder 11 having an exhaust gas passage 10' formed therein, an outer cylinder provided outside the inner cylinder with a gap 15 being formed therebetween and a heating means 13 attached to the inner cylinder 11, the gap 15 being communicated with the exhaust gas passage 10'. When a gas is discharged from the reaction vacuum chamber, a vacuum is created not only in the exhaust gas passage 10' but also in the gap 15. Therefore, release of heat from the heating means to the outside can be suppressed. Consequently, the inner cylinder 11 can be efficiently heated to a sufficiently high temperature, thus preventing deposition and accumulation of a substance contained in the discharged gas on the inner surface of the inner cylinder 11. The deposition and accumulation of such a substance can also be prevented by forming a gas flow layer 18 of, for example, an inert gas, along the inner surface of the inner cylinder 11. <IMAGE></p> |
