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发明名称
Quartz oscillator sensor
摘要
申请公布号
EP0740143(B1)
申请公布日期
2003.01.02
申请号
EP19960104705
申请日期
1996.03.25
申请人
TICONA GMBH
发明人
SCHOENFELD, AXEL, DR.;FEUCHT, GERNOT, DR.;FRANK, GEORG, DR.
分类号
G01N31/00;C30B29/18;C30B29/32;G01N27/00;G01N33/00;H01L41/08;H01L41/18;H03B5/32;H03H9/19;(IPC1-7):G01N11/16
主分类号
G01N31/00
代理机构
代理人
主权项
地址
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