| 发明名称 |
Porous materials |
| 摘要 |
Porous dielectric materials having low dielectric constants, >=30% porosity and a closed cell pore structure are disclosed along with methods of preparing the materials. Such materials are particularly suitable for use in the manufacture of electronic devices.
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| 申请公布号 |
US2003001239(A1) |
申请公布日期 |
2003.01.02 |
| 申请号 |
US20020217120 |
申请日期 |
2002.08.12 |
| 申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
GALLAHGER MICHAEL K.;GORE ROBERT H.;LAMOLA ANGELO A.;YOU YUJIAN |
| 分类号 |
C08J9/26;C04B38/00;H01B3/30;H01B3/46;H01B17/56;H01L21/314;H01L21/316;H01L21/768;H01L23/522;(IPC1-7):H01L29/00;H01L23/58 |
主分类号 |
C08J9/26 |
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