| 摘要 |
To provide a vacuum pump that may heat a flow path of gas effectively with small electric power. A vacuum pump provided with an outer sleeve (16), a stator (18) received in a hollow portion of the outer sleeve (16), a rotor (14) received rotatably within the hollow portion of the outer sleeve (16) for forming a flow path of gas in cooperation with the stator, a base to which the outer sleeve and the stator are to be fixed and supported, a heating electromagnet (60) for generating heat by current supply and forming a magnetic field, a magnetic member (65) forming a magnetic path of magnetic force by the heating electromagnet (60), and a heat radiation plate (67) made of aluminum and fixed to the magnetic member (65). <IMAGE> |
