Sensor for measuring the presence and concentration of chemical components in liquids comprises a semiconductor chip with at least one thin edge area of a swellable polymer

摘要

Sensor comprises a semiconductor chip with at least one thin edge area forming or containing a mechanoelectrical transformer and of a swellable polymer sensitive to the liquid being tested, in the thin region, comprising a polymer network and closed off with a covering with openings. Sensor comprises a semiconductor chip with at least one thin edge area forming or containing a mechanoelectrical transformer and of a swellable polymer sensitive to the liquid being tested, in the thin region, comprising a polymer network and closed off with a covering with openings. The covering is permeable to the liquid and allows diffusion of the chemical components in the polymer network, resulting in the formation of a volume phase transition.