发明名称 |
Manufacture of fine-grained electroplating anodes |
摘要 |
A continuously cast copper ingot is made by a procedure in which turbulence is imparted to the metal/solid interface during the casting operation. The ingot is then hot worked to form a billet having a smaller average grain size and a larger diameter than possible in the past. The billet is especially useful for making electroplating anodes used in the damascene process for making copper interconnects in silicon wafers.
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申请公布号 |
US2003000604(A1) |
申请公布日期 |
2003.01.02 |
申请号 |
US20010897842 |
申请日期 |
2001.07.02 |
申请人 |
BISHOP WILLIAM J.;KRUS DAVID |
发明人 |
BISHOP WILLIAM J.;KRUS DAVID |
分类号 |
B21B3/00;B21B1/02;B22D7/00;B22D11/00;C22F1/08;C25D17/10;(IPC1-7):C25B11/04 |
主分类号 |
B21B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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