发明名称 CHEMICAL VAPOR DEPOSITION METHOD AND SYSTEM.
摘要 <p>A modified chemical vapor deposition (CVD) method and various coatings formed by this method are disclosed. A uniform coating is obtained by the disclosed CVD method by redirecting the energy source and/or the hot gasses produced thereby. The methods disclosed are particularly useful for forming thin film, insulative, oxide coatings on the surface of conductive or superconductive wires. The redirect methods are also useful for producing powders that can be collected for further processing. Metal oxide barrier coatings for polymer food containers are also disclosed.</p>
申请公布号 EP1268186(A1) 申请公布日期 2003.01.02
申请号 EP20000990367 申请日期 2000.12.21
申请人 MICROCOATING TECHNOLOGIES, INC. 发明人 HUNT, ANDREW, T.;DESHPANDE, GIRISH;HWANG, JAN, TZYY-JIUAN;LAYE, NII, SOWA;OLJACA, MIODRAG;SHANMUGHAM, SUBRAMANIAM;SHOUP, SHARA, S.;TOMOV, TRIFON;DALZELL, WILLIAM, J., JR.;PODA, AIMEE;HENDRICK, MICHELLE
分类号 C23C16/18;C23C16/04;C23C16/30;C23C16/40;C23C16/453;(IPC1-7):B32B5/16 主分类号 C23C16/18
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