| 摘要 |
According to an aligning method, positions of measurement marks at a plurality of shot positions on a substrate are measured, measurement values are statistically processed, and a master and the substrate are aligned. When a plurality of measurement marks exist in a shot, measurement marks to be used for alignment are selected from them independently of each other. An alignment measurement sample shot which is not adversely affected by a shot size is selected, so an alignment precision is improved.
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