| 摘要 |
There is disclosed a soft magnetic thin film represented by a composition formula of Feal.Cobl.Ccl.Odl. In this case, atomic % values of the al to dl respectively satisfy the following: 51.0<=al<=95.0, 5 0<=bl<=49.0, 0.5<=cl<=10.0, 0.5<=dl<=20.0, al+bl+cl+dl=100 Thus, it is possible to improve a characteristic of a thin film magnetic head by achieving a high saturation magnetic flux density, suppressing an increase in an anisotropic magnetic field caused by increased concentration of oxygen, and preventing a reduction in permeability.
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