Thin film shape memory alloy actuated flow controller

摘要

A flow controller for use in microelectromechanical systems. The principal components of the controlled are a microvalve and sensor which are micromachined on one surface of a substrate that is formed with a fluid flow channel. The microvalve includes a shape memory alloy actuator element that is operated by a feedback signal from a control circuit. The sensor can be a fluid flow rate sensor or a fluid temperature sensor or a fluid pressure sensor. Conditions in the channel are sensed for generating the feedback signal.