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发明名称
Verfahren zur Herstellung eines Halbleiter-Bauelements mit Gebieten aus isolierendem Material in einem Halbleitersubstrat
摘要
申请公布号
DE60000174(T2)
申请公布日期
2003.01.02
申请号
DE20006000174T
申请日期
2000.08.21
申请人
LUCENT TECHNOLOGIES INC., MURRAY HILL
发明人
LIU, CHUNG-TING;PAI, CHIEN-SHING
分类号
H01L21/76;H01L21/20;H01L21/762;H01L23/52;H01L27/12;(IPC1-7):H01L21/762
主分类号
H01L21/76
代理机构
代理人
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