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发明名称
FLUORINATED SOLVENT COMPOSITIONS CONTAINING HYDROGEN FLUORIDE
摘要
申请公布号
EP1269527(A1)
申请公布日期
2003.01.02
申请号
EP20000945192
申请日期
2000.07.06
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
BEHR, FREDERICK, E.;ZAZZERA, LAWRENCE, A.;RAJTAR, PAUL, E.;PARENT, MICHAEL, J.
分类号
B81C1/00;C09K13/06;C11D7/08;C11D7/26;C11D7/28;C11D7/32;C11D7/36;C11D7/50;C11D7/60;C11D11/00;H01L21/304;H01L21/306;H01L21/308;(IPC1-7):H01L21/306;C11D7/00
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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